Semiconductor Grade O-Rings and Seals

Semiconductor Solar and LCD Manufacturing

Semiconductor production environments can represent some of the harshest environments that o-ring seals can encounter. Processes can be very diverse from High heat, aggressive plasma, hot wet chemicals and Amines, and remote NF3 cleans, At Marco, we are experienced with the demanding applications found in the semiconductor industry. Our experts can assist you in selecting the best material or seal design to increase service life and predictability and reduce contamination, resulting in higher efficiency.

Materials

Through the years different elastomeric materials have been developed to successfully handle harsh conditions, such as Kalrez®, Chemraz®, Perlast® and others, Marco has developed its own brand name Markez® Perfluoroelastomer materials that are equivalent but offer a cost advantage to others.

In addition to Markez Perfluoroelastomers, Marco Rubber hold extensive inventory in Viton® FKM, Fluorosilicone, Viton® Extreme and more, Marco also offers a range of large vulcanized O-rings, we understand that sizes of process chambers have gotten bigger for Solar, LCD and Semiconductor manufacturing, we can offer O-rings that are several feet in diameter if needed using a range of different materials.

Common Materials

• Markez® Perfluoroelastomers and
  Perlast® (Kalrez®, Chemraz® and Valqua® Equivalents)
• Brown, black and white FKM (Viton®)
• High Temperature Red silicone
• EPDM in different colors
• Polyurethane for belts
• Blue Fluorosilicone for Ash and some etch application.
• Vespel®, PEEK®, PTFE, Delrin® and more.

High Performance Plastic Materials

• PEEK Arlon®
• PTFE Avalon®
• Ultem®
• PolyCarbonate
• Acetal
• PPS
• PBI Celazole®
• Polyimide Vespel® Altymid®

Semiconductor Processing: Materials Comparison

Compound #	Datasheet	Color	Hardness (Shore A)	High Temp °F (°C)	Strong Acids	Hot Amines	Semicon Wet	Plasma	Ultra Low Particles	Comparable Compounds	Features
Z1028		Black	75	[object Object] (NaN)						Kalrez® 6375, 4079, 7075	Best value general purpose performance, higher temperature resistance, wide chemical compatibility
Z1400		Black	75	[object Object] (NaN)						Kalrez® 8900, 7075, 4079	Highest temperature FFKM with best long term compression set resistance up to 335ºC, short exposures up to 350ºC, Low outgassing, high purity. Wide range of chemical resistance, acid, solvent resistance
Z1352		Black	75	[object Object] (NaN)						Kalrez® 6375, 6380, 1050LF	General purpose, good in most acids, solvents, improved hot amine and steam resistance with wide range of chemical compatibility.
Z1401		Black	80	[object Object] (NaN)						Kalrez® 4079 &7075	Wider temperature resistance range, general purpose high temp material.
Z1403		White	75	[object Object] (NaN)						Kalrez® 8575, 9500 & Chemraz® 513	Improved plasma resistance, higher purity, wider temperature range, low extractables.
Z1407		Clear Amber	75	[object Object] (NaN)						Kalrez® 6221, LS205 and Chemraz® 625	Higher purity clear translucent, semiconductor and laser grade material, excellent plasma resistance.
Z1411		Clear	62	[object Object] (NaN)						Kalrez® 8002	Higher purity amber tinted clear, same as Markez Z1407 but lower durometer for lower compression force for delicate applications.
Z1419		Dark Brown	75	[object Object] (NaN)						alrez® 9100 and Kalrez® 9300	Higher purity, dark brown, non-carbon black material. Improved high temperature range, excellent plasma resistance, and low outgassing.

Semiconductor, Solar and LCD Manufacturing: Materials Comparison

Compound #	Datasheet	Material	Color	Hardness (Shore A)	High Temp °F (°C)	Low Temp °F (°C)	Features
S1015		Silicone (VMQ)	Orange	70	500 (260)	-65 (-54)	Higher temperature resistant Silicone Great for Furnace and LPCVD applications.
F1001		Fluorosilicone (FVMQ)	Blue	70	350 (177)	-100 (-73)	Blue Fluorosilicone for O3 and O2 Ash and some etch applications. Similar to Parker L1120.
P1000		Polyurethane (PU)	Translucent	70	250 (121)	-65 (-54)	High performance 70 durometer Polyurethane, very pure and high abrasion resistance, good for wafer pads.
V1000		FKM Viton® (A) Fluorocarbon	Black	75	437 (225)	-15 (-26)	Lowest cost highest inventory general purpose commodity FKM Similar to Parker V0747-75.
V1003		FKM Viton® (A) Fluorocarbon	Brown	75	437 (225)	-15 (-26)	General purpose brown FKM, improved oxidation resistance, similar to Parker V884.
V1020		FKM Viton® (A) Fluorocarbon	Black	75	437 (225)	-6 (-21)	Best FKM family chemical resistance, known as Viton® ETP, improved base, amines, ketones, MTBE, MEK, MIBK.
T1000		PTFE Solid (Virgin) Teflon® High Performance Plastic	White	N/A	500 (260)	-250 (-157)	General purpose extreme chemical resistant rigged plastic only seals in limited applications (consider FFKM).
T1001		FEP (Teflon®) Encapsulated Viton	Black Core	N/A	400 (204)	-15 (-26)	General purpose extreme chemical resistant FEP (Teflon®) cover with Silicone Solid core (consider FFKM).

Products

Marco offers any O-ring size with no tooling charges, we also offer X-rings also called Quad-Ring® Seals for dynamic applications in any material, and many of the popular semiconductor O-ring sizes are already tooled. We offer VAT bonded gates in Perlast® and some Markez® materials, we also offer some of the 200mm and 300 mm bonded slit valves in a replacement materials to Chemraz® and Kalrez®. There are many Shamban® and other spring energized seal products in the market that we could directly replace at half the price! Those are used on robot spindles, throttle valves and other locations.

Common Products

• O-rings
• X-rings
• VAT bonded gates
• KF fittings and accessories
• PTFE Throttle valves
• Wafer pad seals
• PTFE seals and O-rings
• SES spring energized seals
• Giant size O-rings

Additional Products

• Fasteners
• High Vacuum Components
• Centering Rings

High Performance Valves

Our valves will change the way you design and operate your equipment. Our on/off and flow control valves provide an elastomer free, all metal actuator for an increased temperature range. Since our valves can be custom made, the application possibilities are endless. New Semiconductor Processing concepts can be developed due to the ability of the valve and actuator to hold very tight vacuum, can operate in the heat zone, and many other possible uses.

Equipment

Through years of experience we have developed a database and knowledge of most equipment in the Market, we can cross reference most OEM part number, Examples, Applied Materials Producer®, DPS, Emax®, HDP Ultima®, RTP, Centura®, P-5000, Lam Excellan®, TCP9600, 9400 Metal, Novellus Vector®, Altus®, Speed®, Sequel®, Tokyo Electron..etc. In addition to that we have worked with OEM manufacturer to develop new sealing methods to solve existing problems or for new designs.