Bonded Slit Valve Door Seal Solution

Reduces Particulation and Eases Installation.

Bonded Slit Valve Door Technology

The Bonded Slit Valve Door (BSV) increases the life expectancy and performance of the door's seal during semiconductor processing. Made from Greene Tweed's proprietary perfluoroelastomer compound, Chemraz® (or other customer requested elastomers), the seal is bonded to an aluminum/stainless steel door. Installation requires only removing and replacing a few bolts when replacing the complete BSV door assembly as opposed to cleaning the gland and installing a new o-ring. A bonded design minimizes abrasion, leading to less particulation in many processes compared to installation of a typical perfluoroelastomer o-ring. Therefore, a bonded-gate design can eliminate installation errors and variations, reduce particle generation caused by o-ring movement in the gland, and provide up to a 10-fold increase in service life.


  • Improved seal integrity
  • Eliminate movement in gland and reduces wear
  • Durable fluorocarbons withstand dynamic use
  • Increased life expectancy of slit valve doors
  • Lower contamination due to limited particle generation
  • Eliminate potential leaks
  • Optimal compression set for extended seal life
  • Decreased replacement downtime
  • Simplified installation
  • Ensure proper seal orientation without twisting
  • No traditional molded parting lines