In-demand Applications Apply Pressure to Chip Manufacturers
Technological developments such as artificial intelligence (AI) and machine learning (ML), ever-increasing telecommunication solutions, and consumer demands for the latest in electronics and devices are driving up the pressure on a semiconductor industry already experiencing shortages. In this environment, the need for high-performing semiconductor FFKM material has never been greater.
Semiconductor manufacturers have been working behind the supply chain curve since the pandemic began, and the shortage in chips needed for everything from computing systems to the latest gaming consoles and even in the automotive sector has earned headlines for months. That demand is not expected to decrease either. McKinsey & Company noted annual revenue in the industry leaped from 5% growth in 2019 to 9% in 2020 and then soared forward another 23% in 2021. That expansion, despite the current shortages, is showing no signs of slowing down.
Manufacturers need to continue to innovate to keep up with recent trends — such as more sophisticated architectures and miniaturization — but have growing concerns about accelerating time to market and reducing the total cost of ownership. All of these factors mean finding high yields with acceptable costs is becoming increasingly difficult for chipmakers, and ramping up the demands on the elastomer components and high-tech seals used in processing equipment.
Smaller product dimensions mean components are more sensitive to contamination, so purity is more important than ever. Chemical and plasma implemented under extreme temperatures and pressure create highly demanding environments. Reliable, high-performing materials are vital to extending the uptime cycle of components.
Under these conditions, Marco Rubber & Plastics has developed a new formulation of its own proprietary FFKM (perfluoroelastomer) material Markez®. This formulation, Markez Z1218, was specifically designed as a semiconductor FFKM to meet the demands of the industry.
Let’s learn why Markez Z1218 is the material solution needed today.
Markez Z1218 Delivers the Performance Needed from a Semiconductor FFKM
Marco Rubber & Plastics offers decades of engineering and applications experience, as well as the latest knowledge in the design of high precision, customized sealing solutions for critical semiconductor applications. We’ve applied this expertise to developing Markez Z1218, an extremely clean, unfilled semiconductor FFKM with minimal particulation, excellent plasma resistance, and an unrivaled compression set.
This combination of properties positions Markez Z1218 as an ideal fit for a wide range of semiconductor processes and the formulation has excellent chemical compatibility for use in a diverse array of industrial applications. The list of recommended applications includes:
- Deposition: LPCVD, CVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD
- Plasma Etching: Oxide and Metal
- Ashing
- Metallization: PVD, Sputtering, and Evaporation
- Ion Implant
- RTP
- Oxidation
- Diffusion
- Lamp Anneal
The performance of Markez Z1218 in such applications is backed by extensive third-party testing. This includes identification of trace metals by ICP-MS and material outgassing in the material itself, and in weight loss percentage, total particle testing, and surface roughness tests against comparable semiconductor FFKM materials in the market. For example:
- Markez Z1218 showed a 40% reduction in total particles in remote plasma testing vs. a market-leading competitor material
- Markez Z1218 displayed less weight loss under the same conditions when compared to seven other semiconductor FFKMs
- The compression set remained impressive even at higher temperatures and long-duration testing; Just 17.1% at 70 hours at 300°C
Get the complete story: View more specifics about Markez Z1218 here.
Performance that Moves the Needle
Markez Z1218 offers the ultimate high purity plasma sealing performance. With operating temperatures ranging from -5°C (23°F) to 280°C (536°F), low plasma erosion, wide chemical resistance, impressive compression set, and minimal particulation, this material is also more readily available and cost-effective than most of the current semiconductor market-leading alternatives.
The excellent physical properties and long service life of the material, combined with the other characteristics, mean semiconductor manufacturers can enjoy a material designed for low particle generation and etch resistance that won’t impose threats to defects or downtime as well. This semiconductor FFKM can:
- Maximize system uptime of advanced semiconductor processes used now
- Extend system up-time from increased in-service seal life
- Reduce equipment downtime
- Extend equipment planned maintenance intervals
- Reduce process contamination
- Minimized cost of ownership through a lower cost of consumables
Get the Data You Need: View the Markez Z1218 spec sheet here.
With access to more than one billion sealing solutions throughout our expansive production network, Marco Rubber & Plastics offers a comprehensive line of semiconductor sealing solutions. However, the ultimate performance of a seal will depend on how well it matches the application itself, and this is especially important when dealing with semiconductor FFKM materials. It’s important to discuss all aspects of your application with an application engineer to find and consider all the right potential solutions. Our technical sales team is available to help you through the process.
With more than 14,000 repeat customers worldwide, Marco Rubber & Plastics has proven it can be counted on to find the ideal match between application and sealing solution.
Seal Your Success with Marco Rubber & Plastics
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