Chemraz O-Ring Supplier

Compound #	Features and Benefits	Service Temp Range (C)	Wet vs Dry	Static vs Dynamic	Primary Choices for Processes (Bold)	Applications

Chemraz 513	Good plasma resistanceGood physical properties. Minimal contamination. Excellent performance history as 'universal product'.	-30 to 210ºC	Dry	Static	Metalization (CVD, PVD, sputtering, evaporation) Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Ion Implant Implant Anneal RTP	Door Seals Slit Valves Window Seals Isolator Valve Seals Lid Seals Gas Inlet Seals KF Fitting Seals
Chemraz 520	Excellent plasma resistance. Outstanding physical properties. Low contaminants. Withstands higher sealing loads. Excellent performance history in higher temperature applications.	-30 to 240ºC	Dry	Static and Dynamic	Metalization (CVD, PVD, sputtering, evaporation) Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Oxidation (LPCVD) Diffusion Ion Implant Implant Anneal RTP	Door Seals Slit Valves Window Seals Isolator Valve Seals Lid Seals Gas Inlet Seals KF Fitting Seals
Chemraz 550	Good chemical resistance. Good physical properties. Used where contamination requirements are less critical. Excellent performance history.	-30 to 210ºC	Wet	Static and Dynamic	Wet Etch (acid, base) Wet Stripping (solvents) Wet Cleaning (UPDI) Wet Metal Plating	Valve Seals Fitting and Union Seals Gaskets Regulator Seals Filter Seals
Chemraz 570 Chemraz 571	Very low contaminants. Extended performance and added reliability. Good physical properties. Excellent performance history in wet systems.	-30 to 210ºC	Wet	Static	Wet Etch (acid, base) Wet Stripping (solvents) Wet Cleaning (UPDI) Wet Metal Plating Chemical Mechanical Planarization (CMP)	Valve Seals Fitting and Union Seals Gaskets Regulator Seals Filter Seals
Chemraz 592	Excellent physical properties. Inert filler system ensures excellent resistance to plasma attack.	-30 to 240ºC	Dry	Static and Dynamic	Dry Ashing (O 2) Oxidation (LPCVD) Diffusion Metalization (CVD, PVD, sputtering, evaporation) Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Ion Implant Implant Anneal RTP	Slit Valves Endpoint Windows Window Seals Valve Seals Lid Seals Gas Inlet Seals KF Fitting Seals Isolator Valve Seals Bell Jar Seals
Chemraz 653	Excellent plasma resistance. Used where contamination requirements are less critical. Suitable for higher temperature applications. Superior compression set.	-15 to 325ºC	Dry	Static and Dynamic	Oxidation (LPCVD) Diffusion RTP Metalization (CVD, PVD, sputtering, evaporation) Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Implant Anneal	Quartz Rod Seals Bell Jar Seals High Temperature Valve Seals KF Fitting Seals
Chemraz E38	Minimal contamination. Withstands a variety of aggressive chemicals. Excellent physical properties. Low metal ion content. Unlimited design flexibility. Suitable for higher temperature applications.	-20 to 260ºC	Dry	Static and Dynamic	Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Remote Plasma Cleans Oxidation (LPCVD) Diffusion Metalization (CVD, PVD, sputtering, evaporation) Dry Plasma Etch Dry Ashing Ion Implant Implant Anneal RTP	Bonded Gate Seals Chamber Seals
Chemraz 661	Minimal particulation. Maximum plasma resistance. Withstands a variety of aggressive chemicals. Excellent physical properties. Unique filler system.	-20 to 240ºC	Dry	Static and Dynamic	Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Oxidation (LPCVD) Diffusion Metalization (CVD, PVD, sputtering, evaporation) Ion Implant Implant Anneal RTP	Endpoint Windows Bell Jar Seals Valve Seals KF Fitting Seals Window Seals Isolator Valve Seals Lid Seals Gas Inlet Seals Slit Valve Seals Chamber Seals
Fluoro- elastomer 742	Outstanding physical properties. Conforms well to handware features. Used where contamination requirements are less critical. Good performance history in chemically aggressive systems.	-30 to 250ºC	Dry and Wet	Static and Dynamic	Metalization (CVD, PVD, sputtering, evaporation) Ion Implant Oxidation (LPCVD) Diffusion Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Wet Etch (acid, base) Wet Cleaning (UPDI) Wet Metal Plating Implant Anneal RTP	Door Seals Slit Valves Window Seals Lid Seals Gas Inlet Seals KF Fitting Seals Valve Seals Gaskets Fitting and Union Seals
Fluoro- elastomer 931	Outstanding physical properties. Used where contamination requirements are less critical. Superior performance under higher sealing loads. Good performance history in chemically aggressive systems.	-30 to 250ºC	Dry and Wet	Static and Dynamic	Ion Implant Oxidation (LPCVD) Diffusion Metalization (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Dry Plasma Etch Remote Plasma Cleans Dry Ashing Wet Etch (acid, base) Wet Cleaning (UPDI) Wet Metal Plating Implant Anneal RTP	Door Seals Slit Valves Window Seals Lid Seals Gas Inlet Seals KF Fitting Seals Valve Seals Gaskets Fitting and Union Seals
Fluoraz 888	Outstanding physical properties. Good performance history in aggressive chemicals. Conforms well to hardware features.	0 to 230ºC	Dry and Wet	Static and Dynamic	Metalization (CVD, PVD, sputtering, evaporation) Dry Plasma Etch Ion Implant Oxidation (LPCVD) Diffusion Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) Remote Plasma Cleans Dry Ashing Implant Anneal RTP	Valve Seals KF Fitting Seals Window Seals Lid Seals Gas Inlet Seals Chamber Seals Door Seals Gaskets Fitting and Union Seals Slit Valves

The information on this page is to the best of our knowledge accurate and reliable. However, Marco Rubber makes no warranty, expressed or implied, that parts manufactured from this material will perform satisfactorily in the customer's application. It's the customer's responsibility to evaluate parts prior to use.

The temperature ranges presented on this page are approximations for dry air service only and should not be used to determine design specifications or end-use temperature limits. Actual temperature range of a compound in an end-use application is highly dependent on part type, hardware configuration, applied forces, chemical media, pressure and thermal cycling effects, and other factors. The most practical way of determining an end-use temperature range is testing in the actual application conditions. Consult a Marco Engineer for more details.

Chemraz® Compound Comparison

Compound #	Handling, Cleaning, Packaging, Designator Options	Compound Type	Color	Service Temp Range (C)	Specific Gravity	Hardness (Shore A)	Compression Set (%)	Tensile Strength (kPa)	Elongation %	Modulus 50% Elongation PSI (kPa)	Modulus 100% Elongation PSI (kPa)

Chemraz 513	SC SS	Perfluoro	White	-30 to 210	2.22	80	25	1660 (11032)	165	540 (3723)	1050 (7239)
Chemraz 520	SC SS	Perfluoro	White	-30 to 240	2.1	90	35	1950 (13445)	110	990 (6826)	1780 (12273)
Chemraz 550	SD	Perfluoro	Black	-30 to 210	1.93	75	25	1750 (12066)	140	450 (3103)	1150 (7929)
Chemraz 570	SD	Perfluoro	White	-30 to 210	1.98	70	35	1300 (8963)	145	350 (2413)	780 (5378)
Chemraz 571	SD	Perfluoro	White	-30 to 210	1.99	80	35	1550 (10687)	130	625 (4309)	1240 (8549)
Chemraz 592	SS	Perfluoro	White	-30 to 240	2.07	85	36	2100 (14479)	120	700 (4826)	1770 (12204)
Chemraz 653	SD	Perfluoro	Black	-15 to 325	1.99	80	14 26**	1830 (12618)	135	360 (2482)	1090 (7516)
Chemraz E38	SS	Perfluoro	White	-20 to 260	1.99	80	21	2200 (15169)	150	410 (2827)	1100 (7585)
Chemraz HT300	SC	Perfluoro	White	-20 to 300	2.14	85	17	2100 (14480)	175	600 (4137)	1100 (7585)
Chemraz 661	SS	Perfluoro	White	-20 to 240	2.11	80	17	2620 (18065)	140	400 (2758)	1200 (8274)
Fluoro- elastomer 742	SP	Fluorocarbon	Black	-30 to 250	1.82	75	20	2050 (14134)	182	600 (4137)	1026 (7074)
Fluoro- elastomer 931	SP	Fluorocarbon	Black	-30 to 250	1.81	90	27	2245 (15479)	107	936 (6453)	1950 (13445)
Fluoraz 888	SP	FEPM Fluoro elastomer	Tan	0 to 230	1.56	70	48	3320 (22892)	325	190 (1310)	455 (3137)

* 70 hours @ 204ºC @ 25% deflection

** 70 hours @ 288ºC @ 25% deflection

Product Handling, Cleaning and Packaging Designators

The handling, cleaning and packaging of elastomeric seals, for use in semiconductor equipment, can be as critical to the performance of the seal as the seal material. One of the following designators is included in each Greene, Tweed part number.

SD Semiconductor grade product with special handling using gloves during processing. Product is washed with deionized water (DI) and inspected to semiconductor standards. Class 100 packaging in double plastic bags.

SS Semiconductor grade product with special handling using gloves during processing. Product is washed with a solvent mixture (50/50 isopropyl alcohol and heptane) and inspected to semiconductor standards. Class 100 packaging in double plastic bags.

SP Industrial grade product without special handling during processing. Product is washed with isopropyl alcohol and is inspected to industrial standards. Standard packaging in single plastic bags.

SC Semiconductor grade product with special handling using gloves during processing. Product is inspected to semiconductor standards. Standard packaging in single plastic bags.

Chemraz® O-Rings

High Performance O-Rings for the Semiconductor Industry and High Temperature Applications.

Chemraz® Compound Comparison

Product Handling, Cleaning and Packaging Designators