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Semiconductor Grade O-Rings and Seals +

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We are experienced with the demanding applications found in the semiconductor industry.
Contact a Semiconductor Application Engineer

Selecting the best Material or Seal Design can:

Increase Service Life and Predictability
Reduce Contamination
Resulting in Higher Efficiency

 

O-Ring and Seal Material Specifications

Kalrez®
Simriz®
Chemraz
®
Viton
® ETP
Highly Fluorinated Viton
®
High Purity Viton
®
Standard Viton (A)

Shiney Finish Viton
Teflon Encapsulated

Silicone
Buna-Nitrile
Ethylene Propylene (EPDM)
Fluorosilicone
Neoprene
Urethane
Teflon

PEEK Arlon®
PTFE Avalon®
PEI Ultem
®
PolyCarbonate
Acetal
PPS
PBI Celazole
®

Polyimide Vespel
® Altymid®


Fluid Compatibility Guide


Semiconductor O-Ring Groove Design Guides
Static Face Seal with a Rectangular Gland
Static Face Seal with a Dovetail Gland
Static I.D./O.D. Seal with a Rectangular Gland
Dynamic I.D./O.D. Seal with a Rectangular Gland

High Performance Valves
Our valves will change the way you design and operate your equipment.  Our on/off and flow control valves provide an elastomer free, all metal actuator for an increased temperature range. Since our valves can be custom made, the application possibilities are endless. New Semiconductor Processing concepts can be developed due to the ability of the valve and actuator to hold very tight vacuum, can perate in the heat zone, and many other possible uses.

 

Ceramics
Precision fabrication of ultra-hard materials including:
High Purity Alumina, Silicon Carbide, Aluminum Nitride, Silicon Nitride, Tungsten Carbide, Sapphire and many more.



Applied Materials P-5000 Slit Valve Door Seal Solution
Eliminate Installation Errors and Variations
Reduce Particle Generation caused by O-Ring Movement in the Gland
Increase Service Life with less Compression Set

Fasteners

High Vacuum Components


Keep up with all the latest advances

Contact a Semiconductor Application Engineer

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Copyright © 1997-2003  Marco Rubber & Plastic Products, Inc.
334 Clark Street  *  North Andover, MA 01845  USA
1-800-775-6525  Fax: 978-688-6915
e-mail Marco Rubber

Viton® and Kalrez® are registered trademark of DuPont Performance Elastomers
Teflon® and Vespel® are registered trademarks of DuPont.
Chemraz®, Altymid®, and Arlon® are registered trademarks of Green Tweed.