Semiconductor Grade Polyimide Plastics

Featuring Altymid® the Vespel® Alternative

Altymid® Polyimide Application Data

LOW ETCH RATE
LOW EXTRACTABLES
COST EFFECTIVENESS

EXCELLENT ELECTRICAL PROPERTIES
EXCELLENT MECHANICAL PROPERTIES
SERVICE TEMPERATURE UP TO 300°C

WIDE RANGE OF PLASTIC COMPOUNDS
CAN PROVIDE PRODUCTS AS BLANKS, NET MOLDED SHAPES, OR FINAL MACHINED PARTS

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semi altymid

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ALTYMID® 750
TYPICAL PHYSICAL PROPERTIES

PROPERTIES	ALTYMID® 750	Units	ASTM Method
Tensile Strength	9,500	psi	D-638
Elongation	4.5	%	D-638
Flex Strength	13,500	psi	D-790
Flex Modulus	400,000	psi	D-790
Coeffiecient of Linear Thermal Expansion (0-572°F) (572°F - 77°F)	2.67 x 10^-5 2.74 x 10^-5	in/in/°F	E228
Specific Gravity	1.42
Hardness	84 93	Shore D Rockwell M	D-2240 D-785
Dielectric Strength Short Time	433 (121 mils thick)	V/mil	D-149
Dielectric Constant 100 HZ 10 KHZ 1 MHZ	3.03 3.02 3.22		D-150
Surface Resistivity	7.13 x 10¹⁵	Ohms	D-257
Volume Resistivity	1.03 x 10¹⁶	Ohm-m	D-257

WEIGHT CHANGE COMPARISON

Weight Change Comparison 1.TIF (81398 bytes)

PLASMA TEST
Silicide etching            WSi
Chemistry:                    CI₂/O₂/N₂
Pressure (mTorr):         4
Power RF (Watts):        700
Bias RF (Volts):           100
Exposure Time (sec):   600

				RATE (g/sec)
Compound	Pre-Weight (g)	Post-Weight (g)	Weight gain/loss	x E-06
Altymid 750	0.14034	0.14020	-0.00014	-0.23
Vespel* SP-1	0.12993	0.12925	-0.00068	-1.13

Weight Change Comparison 2.TIF (81466 bytes)

PLASMA TEST
Silicide etching            WSi
Chemistry:                    CI₂/SF₆/O₂/N₂
Pressure (mTorr):         4
Power RF (Watts):        500
Bias RF (Volts):           100
Exposure Time (sec):   600

				RATE (g/sec)
Compound	Pre-Weight (g)	Post-Weight (g)	Weight gain/loss	x E-06
Altymid 750	0.14034	0.14020	-0.00014	-0.23
Vespel* SP-1	0.12993	0.12925	-0.00068	-1.13

ALTYMID® 750
ELEMENT BULK ANALYSIS

ELEMENT	AMOUNT	UNITS
Antimony	6.3	ppb
Arsenic	2.4	ppb
Barium	1.6	ppb
Bromine	458	ppb
Cadmium	210	ppb
Cerium	39	ppb
Cesium	13	ppb
Chromium	878	ppb
Cobalt	24	ppb
Europium	5.9	ppb
Gold	0.15	ppb
Hafnium	6.8	ppb
Iridium	0.26	ppb
Iron	6200	ppb
Lanthanum	2.7	ppb
Lutetium	.43	ppb
Molybdenum	25	ppb
Nickel	3000	ppb
Potassium	0.5	ppb
Rubidium	240	ppb
Samarium	0.2	ppb
Scandium	0.9	ppb
Selenium	76	ppb
Silver	38	ppb
Sodium	240	ppb
Tantalum	10	ppb
Tellurium	97	ppb
Terbium	5.3	ppb
Thorium	7.1	ppb
Tin	4200	ppb
Titanium	15	ppb
Tungsten	5.5	ppb
Uranium	8.0	ppb
Ytterbium	2.5	ppb
Zinc	407	ppb
Zirconium	2200	ppb

Tested by Neutron Activation

ALTYMID® 750
EXTRACTABLE ELEMENTS IN UPDI WATER @ 80°C FOR 14 DAYS

ELEMENT	AMOUNT	DETECTION LIMIT	UNITS
Aluminium	0.21	0.05	ppm
Antimony	*	0.02	ppm
Arsenic	*	0.20	ppm
Barium	*	1.01	ppm
Beryllium	*	0.04	ppm
Bismuth	*	0.04	ppm
Boron	*	0.50	ppm
Cadmium	*	0.03	ppm
Calcium	*	3.0	ppm
Cerium	*	0.01	ppm
Cesium	*	0.02	ppm
Chromium	*	0.03	ppm
Cobalt	*	0.02	ppm
Copper	0.07	0.05	ppm
Dysprosium	*	0.04	ppm
Erbium	*	0.02	ppm
Europium	*	0.02	ppm
Gadolinium	*	0.04	ppm
Gallium	*	0.04	ppm
Germanium	*	0.05	ppm
Gold	*	0.05	ppm
Hafnium	*	0.03	ppm
Holmium	*	0.01	ppm
Indium	*	0.02	ppm
Iridium	*	0.06	ppm
Iron	5.30	0.10	ppm
Lanthanum	*	0.01	ppm
Lead	*	0.05	ppm
Lithium	*	0.03	ppm
Lutetium	*	0.01	ppm
Magnesium	0.08	0.08	ppm
Manganese	0.19	0.03	ppm
Mercury	*	0.05	ppm
Molybdenum	*	0.05	ppm
Neodymium	*	0.02	ppm
Nickel	*	0.05	ppm
Niobium	*	0.02	ppm
Osmium	*	0.02	ppm
Palladium	*	0.06	ppm
Platinum	*	0.08	ppm
Potassium	*	5.0	ppm
Praseodymium	*	0.01	ppm
Rhenium	*	0.06	ppm
Rhodium	*	0.02	ppm
Rubidium	*	0.01	ppm
Ruthenium	*	0.05	ppm
Samarium	*	0.04	ppm
Scandium	*	0.20	ppm
Selenium	*	7.0	ppm
Silicon	*	50	ppm
Silver	*	0.03	ppm
Sodium	2.7	0.06	ppm
Strontium	*	0.01	ppm
Tantalum	*	0.02	ppm
Tellurium	*	0.04	ppm
Terbium	*	0.02	ppm
Thallium	*	0.05	ppm
Thorium	*	0.02	ppm
Thulium	*	0.01	ppm
Tin	*	0.02	ppm
Titanium	*	0.05	ppm
Tungsten	*	0.02	ppm
Uranium	*	0.02	ppm
Vanadium	*	0.03	ppm
Ytterbium	*	0.03	ppm
Yttrium	*	0.02	ppm
Zinc	0.16	0.06	ppm
Zirconium	*	0.05	ppm

*Element was not found above the detection limit

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