TRICHLOROSILANE Resistant O-Rings and Seals
Trichlorosilane, also known as trichloromethylsilane, is a chemical compound commonly used in the semiconductor and electronics industries. It is used to etch silicon wafers and to create thin layers of silicon oxide on their surfaces.
When rubber is exposed to trichlorosilane, the rubber material may suffer from a reduction in elasticity, a decrease in physical strength, and an increased tendency to crack. These effects are caused by the chemical's ability to corrode rubber polymers, leading to a breakdown of the material's molecular structure. Furthermore, trichlorosilane can cause metal parts and fasteners to corrode, leading to a breach of the rubber seal. The best way to avoid these issues is to select a rubber material that is specifically designed to resist trichlorosilane.
FKM (Viton®)
Viton ® o-rings from Marco Rubber offer excellent compatibility with a range of chemicals, oils and resist high temperatures up to 400F. Viton ® is also known as FKM made of fluoroelastomer one of the most versatile and widely used sealing materials.
V1000 FKM
- General purpose material
V1003 FKM
- General purpose material
V1007 FKM
- For higher pressure applications
Rubber Material Compatibility with TRICHLOROSILANE
View some of our other material compatibility ratings with TRICHLOROSILANE. If you don't see what you're looking for or need more guidance, our team of experienced sealing design engineers can help select the best sealing products and material for your specific application.
View Full Chemical Compatibility Guide
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