{"id":943,"date":"2026-07-22T19:49:02","date_gmt":"2026-07-22T19:49:02","guid":{"rendered":"https:\/\/www.marcorubber.com\/blog\/?p=943"},"modified":"2026-07-22T20:11:17","modified_gmt":"2026-07-22T20:11:17","slug":"how-to-select-the-right-sealing-materials-for-semiconductor-applications","status":"publish","type":"post","link":"https:\/\/www.marcorubber.com\/blog\/?p=943","title":{"rendered":"How to Select the Right Sealing Materials for Semiconductor Applications"},"content":{"rendered":"<h2><strong><span class=\"TextRun MacChromeBold SCXW128368951 BCX0\" lang=\"EN-US\" xml:lang=\"EN-US\" data-contrast=\"none\"><span class=\"NormalTextRun SCXW128368951 BCX0\">Why\u00a0<\/span><span class=\"NormalTextRun SCXW128368951 BCX0\">Semiconductor<\/span><span class=\"NormalTextRun SCXW128368951 BCX0\">\u00a0<\/span><span class=\"NormalTextRun SCXW128368951 BCX0\">Applications\u00a0<\/span><span class=\"NormalTextRun SCXW128368951 BCX0\">Require<\/span><span class=\"NormalTextRun SCXW128368951 BCX0\">\u00a0<\/span><span class=\"NormalTextRun SCXW128368951 BCX0\">a Different Approach to Material Selection<\/span><\/span><\/strong><span class=\"EOP Selected SCXW128368951 BCX0\" data-ccp-props=\"{}\">\u00a0<\/span><\/h2>\n<p><span data-contrast=\"auto\">O-rings create the seal for vacuum environments, prevent toxic gas leaks, and contain corrosive chemicals. They are necessary for protecting highly sensitive wafers from particulate contamination and process defects.<\/span><span data-contrast=\"none\"> Material selection is also a key factor in reducing stickiness and adhesion issues for wafer transfer.\u00a0<\/span><span data-ccp-props=\"{}\">Therefore, selecting the right sealing materials for semiconductor applications requires a different approach.<\/span><\/p>\n<p><span data-contrast=\"none\">O-rings in semiconductor\u00a0applications\u00a0often:<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"3\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"1\" data-aria-level=\"1\"><span data-contrast=\"none\">Are\u00a0frequently\u00a0cycled (compression\/decompression creates wear particles)<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"3\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"2\" data-aria-level=\"1\"><span data-contrast=\"none\">Are often exposed to aggressive chemistries, plasma, or UV<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"3\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"3\" data-aria-level=\"1\"><span data-contrast=\"none\">Operate at elevated temperatures where outgassing rates increase significantly<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"3\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"4\" data-aria-level=\"1\"><span data-contrast=\"none\">Can be\u00a0overlooked during contamination root-cause analysis<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-968 size-full\" src=\"https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-Semicon-1.jpg\" alt=\"Sealing materials for semiconductor applications - wafer automation\" width=\"1024\" height=\"576\" srcset=\"https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-Semicon-1.jpg 1024w, https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-Semicon-1-300x169.jpg 300w, https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-Semicon-1-768x432.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2><strong><span class=\"TextRun MacChromeBold SCXW108847132 BCX0\" lang=\"EN-US\" xml:lang=\"EN-US\" data-contrast=\"none\"><span class=\"NormalTextRun SCXW108847132 BCX0\"><br \/>\nThe Most Common O-Ring and Sealing Materials for Semiconductor\u00a0Applications<\/span><\/span><\/strong><\/h2>\n<p>&nbsp;<\/p>\n<h3><strong><a href=\"https:\/\/www.marcorubber.com\/markez-o-rings.htm\">1. Perfluoroelastomer<\/a><a href=\"https:\/\/www.marcorubber.com\/markez-o-rings.htm\">\u00a0(FFKM)<\/a> \u2014 The Gold Standard<\/strong><\/h3>\n<p><b><span data-contrast=\"none\">Best for:<\/span><\/b><span data-contrast=\"none\"> Semiconductor fab, plasma etch chambers, CVD (chemical vapor deposition) equipment tools, aggressive wet chemistries, high-purity processing.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\">FFKM is the default recommendation for demanding clean room environments, and for good reason. The material offers:<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"1\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"1\" data-aria-level=\"1\"><b><span data-contrast=\"none\">Near-universal chemical resistance<\/span><\/b><span data-contrast=\"none\">\u00a0\u2014 compatible with\u00a0nearly every\u00a0solvent, acid, base, and oxidizer used in semiconductor processing<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"1\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"2\" data-aria-level=\"1\"><b><span data-contrast=\"none\">Extremely low outgassing<\/span><\/b><span data-contrast=\"none\">\u00a0\u2014 critical for vacuum and plasma environments where volatile compounds can contaminate wafer surfaces or optical components<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"1\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"3\" data-aria-level=\"1\"><b><span data-contrast=\"none\">High temperature\u00a0performance<\/span><\/b><span data-contrast=\"none\">\u00a0\u2014 most FFKM compounds are rated from 480\u00b0F to over 625\u00b0F (249\u00b0C to 330\u00b0C+)<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"1\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"4\" data-aria-level=\"1\"><b><span data-contrast=\"none\">High purity formulations<\/span><\/b><span data-contrast=\"none\">\u00a0\u2014 available in ultra-low extractable grades designed to meet SEMI standards<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"1\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"5\" data-aria-level=\"1\"><b><span data-contrast=\"none\">Clean Room\u00a0Manufactured<\/span><\/b><span data-contrast=\"none\">-for ultra purity-some\u00a0FFKM compounds can\u00a0be made in\u00a0a clean\u00a0room\u00a0and\u00a0individually packaged<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<p><span data-contrast=\"none\">Marco Sealing Solutions&#8217; proprietary\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/markez-ffkm.htm\">Markez\u00ae FFKM line<\/a><span data-contrast=\"none\"> offers the performance profile of major brands like Kalrez\u00ae and Chemraz\u00ae at a significantly lower cost. Markez compounds\u00a0<\/span><a href=\"http:\/\/www.marcorubber.com\/store\/compound\/z1403\">Z1403<\/a><b><span data-contrast=\"none\">\u00a0and <\/span><\/b><a href=\"https:\/\/www.marcorubber.com\/store\/compound\/z1206\">Z1206<\/a><span data-contrast=\"none\">, for example,\u00a0are\u00a0white FFKMs\u00a0designed specifically for high-purity semiconductor applications with improved plasma resistance\u00a0for direct plasma exposure\u00a0and low extractables \u2014 comparable to Kalrez\u00ae 8575 and Chemraz\u00ae 513. For the most demanding high-temperature work,\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/store\/compound\/z1400\">Z1400<\/a><span data-contrast=\"none\">\u00a0delivers compression set resistance up to 335\u00b0C with very low outgassing, suitable for the harshest etch and deposition environments.\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/store\/compound\/z1206\">Z1206<\/a><span data-contrast=\"none\">\u00a0<\/span><span data-contrast=\"auto\">offers almost universal chemical compatibility for use in semiconductor and general industrial applications.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><b><span data-contrast=\"none\">The tradeoff:<\/span><\/b><span data-contrast=\"none\">\u00a0FFKM is the most expensive elastomer option. In applications where its full performance envelope isn&#8217;t required, other materials offer better value.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-969 size-full\" src=\"https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-CleanRoom-1.jpg\" alt=\"Sealing materials for semiconductor applications - wafer in clean room environment\" width=\"1024\" height=\"576\" srcset=\"https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-CleanRoom-1.jpg 1024w, https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-CleanRoom-1-300x169.jpg 300w, https:\/\/blog.marcorubber.com\/wp-content\/uploads\/2026\/07\/Article-CleanRoom-1-768x432.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h3><b><span data-contrast=\"none\"><a href=\"https:\/\/www.marcorubber.com\/viton-o-rings.htm\">2. FKM (Viton\u00ae)<\/a> \u2014 The Workhorse for Moderate Demands<\/span><\/b><\/h3>\n<p><b><span data-contrast=\"none\">Best for:<\/span><\/b><span data-contrast=\"none\">\u00a0Less aggressive wet process tools, general-purpose semiconductor equipment<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\"><a href=\"https:\/\/www.marcorubber.com\/viton-o-rings.htm\">FKM<\/a> (commonly sold under the Viton\u00ae brand) is the most widely used high-performance elastomer\u00a0in the\u00a0semiconductor\u00a0industry.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\">Key attributes for\u00a0semiconductor\u00a0use:<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"2\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"1\" data-aria-level=\"1\"><span data-contrast=\"none\">Good chemical resistance to many acids, oils, and fuels<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"2\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"2\" data-aria-level=\"1\"><span data-contrast=\"none\">Temperature resistance up to ~400\u00b0F (204\u00b0C)<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"2\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"3\" data-aria-level=\"1\"><span data-contrast=\"none\">Better particle generation profile than standard nitrile or EPDM<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<ul>\n<li aria-setsize=\"-1\" data-leveltext=\"\uf0b7\" data-font=\"Symbol\" data-listid=\"2\" data-list-defn-props=\"{&quot;335552541&quot;:1,&quot;335559685&quot;:720,&quot;335559991&quot;:360,&quot;469769226&quot;:&quot;Symbol&quot;,&quot;469769242&quot;:[8226],&quot;469777803&quot;:&quot;left&quot;,&quot;469777804&quot;:&quot;\uf0b7&quot;,&quot;469777815&quot;:&quot;hybridMultilevel&quot;}\" data-aria-posinset=\"4\" data-aria-level=\"1\"><span data-contrast=\"none\">Significantly lower cost than FFKM<\/span><span data-ccp-props=\"{&quot;335559739&quot;:0}\">\u00a0<\/span><\/li>\n<\/ul>\n<p><span data-contrast=\"none\"><a href=\"https:\/\/www.marcorubber.com\/viton-o-rings.htm\">FKM<\/a> is a reasonable choice for equipment operating in less aggressive chemical environments \u2014 for example, process tools that see moderate temperatures and standard solvents, but not plasma or strong oxidizers. It also appears frequently in semiconductor-adjacent applications such as facility infrastructure, where FFKM performance isn&#8217;t warranted.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><a href=\"https:\/\/www.marcorubber.com\/store\/compound\/V1020\">V1020<\/a><b><span data-contrast=\"none\">\u00a0<\/span><\/b><span data-contrast=\"auto\">is one of the most chemically\u00a0resilient\u00a0FKM types available. Compare to Parker V1260-75.\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/store\/compound\/v1000\">V1000<\/a><span data-contrast=\"none\"> is a low-cost, high-inventory general-purpose commodity FKM, similar to Parker V0747-75<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><b><span data-contrast=\"none\">The tradeoff:<\/span><\/b><span data-contrast=\"none\">\u00a0FKM is not recommended for hot amine exposure, steam, or many plasma applications. Outgassing performance, while better than commodity elastomers,\u00a0doesn&#8217;t\u00a0approach FFKM grades. It can also be affected by certain ketones and esters common in some cleaning protocols.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<h3><b><span data-contrast=\"none\"><a href=\"https:\/\/www.marcorubber.com\/fluorosilicone-o-rings.htm\">3. Fluorosilicone(FVMQ)<\/a> \u2014 Ash and Etch Applications<\/span><\/b><span data-ccp-props=\"{}\">\u00a0<\/span><\/h3>\n<p><b><span data-contrast=\"none\">Best for:<\/span><\/b><span data-contrast=\"none\">\u00a0O3 and O2 ash processes, some etch applications, environments requiring both low-temperature flexibility and moderate chemical resistance<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\"><a href=\"https:\/\/www.marcorubber.com\/fluorosilicone-o-rings.htm\">Fluorosilicone<\/a>\u00a0occupies a niche between silicone and FKM \u2014 it combines the wide temperature range of silicone with meaningfully improved chemical resistance. In semiconductor manufacturing, blue\u00a0fluorosilicone\u00a0compounds are a recognized choice for ozone and oxygen-based ash tools.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\">Marco\u00a0recommends the\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/store\/compound\/F1001\">F1001<\/a><b><span data-contrast=\"none\"> blue\u00a0fluorosilicone<\/span><\/b><span data-contrast=\"none\">\u00a0(Shore A 70)\u00a0which\u00a0is rated down to -100\u00b0F (-73\u00b0C) while handling the oxidizing environments that standard silicone cannot tolerate.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span class=\"TextRun MacChromeBold SCXW2657667 BCX0\" lang=\"EN-US\" xml:lang=\"EN-US\" data-contrast=\"none\"><span class=\"NormalTextRun SCXW2657667 BCX0\">The tradeoff:<\/span><\/span><span class=\"TextRun SCXW2657667 BCX0\" lang=\"EN-US\" xml:lang=\"EN-US\" data-contrast=\"none\"><span class=\"NormalTextRun SCXW2657667 BCX0\">\u00a0<\/span><span class=\"NormalTextRun SpellingErrorV2Themed SCXW2657667 BCX0\">Fluorosilicone<\/span><span class=\"NormalTextRun SCXW2657667 BCX0\">\u00a0is not suitable for ketones, esters, or brake fluids. It\u00a0<\/span><span class=\"NormalTextRun SCXW2657667 BCX0\">shouldn&#8217;t<\/span><span class=\"NormalTextRun SCXW2657667 BCX0\">\u00a0be specified for applications that require FFKM-level chemical resistance.<\/span><\/span><span class=\"EOP Selected SCXW2657667 BCX0\" data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<h3><b><span data-contrast=\"none\"><a href=\"https:\/\/www.marcorubber.com\/teflon-encapsulated-o-rings.htm\">4. PTFE and Encapsulated O-Rings<\/a> \u2014 When Elastomers Aren&#8217;t Enough<\/span><\/b><\/h3>\n<p><b><span data-contrast=\"none\">Best for:<\/span><\/b><span data-contrast=\"none\">\u00a0Extremely aggressive chemistries, applications where any elastomer contamination is unacceptable, ultra-pure fluid handling,\u00a0and\u00a0when\u00a0low\u00a0friction\u00a0is\u00a0required<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\">For applications where even FFKM\u00a0isn&#8217;t\u00a0appropriate \u2014\u00a0or where\u00a0a very soft\u00a0sealing force is\u00a0required\u00a0against a delicate surface \u2014 <a href=\"https:\/\/www.marcorubber.com\/teflon-encapsulated-o-rings.htm\">PTFE and FEP-encapsulated\u00a0o-rings<\/a>\u00a0offer a chemically inert alternative. PTFE itself has\u00a0virtually universal\u00a0chemical resistance and near-zero extractables.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\">The engineering tradeoff is mechanical: PTFE is not elastic. <a href=\"https:\/\/www.marcorubber.com\/teflon-encapsulated-o-rings.htm\">Encapsulated\u00a0o-rings<\/a>\u00a0(a silicone or FKM core wrapped in an FEP or PTFE jacket) recover some of that compliance while\u00a0maintaining\u00a0the inert outer surface.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\">These are particularly common in ultra-high-purity fluid delivery systems and gas panels where any elastomer outgassing could compromise process chemistry.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<h2><strong><span class=\"TextRun MacChromeBold SCXW108847132 BCX0\" lang=\"EN-US\" xml:lang=\"EN-US\" data-contrast=\"none\"><span class=\"NormalTextRun SCXW108847132 BCX0\">How to Choose: A Decision Framework<\/span><\/span><\/strong><span class=\"EOP Selected SCXW108847132 BCX0\" data-ccp-props=\"{}\">\u00a0<\/span><\/h2>\n<p><b><span data-contrast=\"none\">Condition:\u00a0<\/span><\/b><span data-contrast=\"none\">Plasma etch or deposition (CVD, PVD, ALD)<\/span><br \/>\n<b><span data-contrast=\"none\">Recommended Material:\u00a0<\/span><\/b><span data-contrast=\"none\">FFKM (Markez\u00ae <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1403\">Z1403<\/a>, <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1400\">Z1400<\/a>, <a href=\"https:\/\/www.marcorubber.com\/inquiry-quote.htm\">Z1419<\/a>, <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1206\">Z1206<\/a>)<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><b><span data-contrast=\"none\">Condition:\u00a0<\/span><\/b><span data-contrast=\"none\">Hot amines, strong acids, wide chemical range<\/span><br \/>\n<b><span data-contrast=\"none\">Recommended Material:\u00a0<\/span><\/b><span data-contrast=\"none\">FFKM (Markez\u00ae <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1352\">Z1352<\/a>, <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1028\">Z1028<\/a>)<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><b><span data-contrast=\"none\">Condition:\u00a0<\/span><\/b><span data-contrast=\"none\">High-temp furnace \/ LPCVD, inert environment<\/span><br \/>\n<b><span data-contrast=\"none\">Recommended Material:\u00a0<\/span><\/b><span data-contrast=\"none\">FFKM (Markez\u00ae <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1403\">Z1403<\/a>)\u00a0Silicone VMQ<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><b><span data-contrast=\"none\">Condition:\u00a0<\/span><\/b><span data-contrast=\"none\">O3 \/ O2 ash process<\/span><br \/>\n<b><span data-contrast=\"none\">Recommended Material:\u00a0<\/span><\/b><span data-contrast=\"none\">FFKM\u00a0(Markez <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1403\">Z1403<\/a>, <a href=\"https:\/\/www.marcorubber.com\/store\/compound\/Z1206\">Z1206<\/a>)\u00a0Fluorosilicone\u00a0FVMQ<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><b><span data-contrast=\"none\">Condition:\u00a0<\/span><\/b><span data-contrast=\"none\">Moderate chemical exposure, lower cost required<\/span><br \/>\n<b><span data-contrast=\"none\">Recommended Material:\u00a0<\/span><\/b><a href=\"https:\/\/www.marcorubber.com\/viton-o-rings.htm\"><span data-contrast=\"none\">FKM \/ Viton\u00ae<\/span><\/a><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><b><span data-contrast=\"none\">Condition:\u00a0<\/span><\/b><span data-contrast=\"none\">Ultra-pure fluid \/ gas delivery, extreme purity<\/span><br \/>\n<b><span data-contrast=\"none\">Recommended Material:\u00a0<\/span><\/b><span data-contrast=\"none\"><a href=\"https:\/\/www.marcorubber.com\/teflon-o-rings.htm\">PTFE<\/a> or <a href=\"https:\/\/www.marcorubber.com\/teflon-encapsulated-o-rings.htm\">FEP-encapsulated<\/a><\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<h2><strong><span class=\"TextRun MacChromeBold SCXW85070120 BCX0\" lang=\"EN-US\" xml:lang=\"EN-US\" data-contrast=\"none\"><span class=\"NormalTextRun SCXW85070120 BCX0\">Working With a Specialist Makes a Difference<\/span><\/span><\/strong><span class=\"EOP Selected SCXW85070120 BCX0\" data-ccp-props=\"{}\">\u00a0<\/span><\/h2>\n<p><span data-contrast=\"auto\">Selecting the right sealing materials for semiconductor applications<\/span><span data-contrast=\"none\">\u00a0isn&#8217;t\u00a0a\u00a0catalog\u00a0exercise.\u00a0<\/span><span data-contrast=\"auto\">\u00a0It\u00a0requires matching the material to the exact demands of your specific process environment.<\/span><span data-contrast=\"none\">\u00a0The intersection of\u00a0<\/span><span data-contrast=\"auto\">chemical resistance, thermal stability, outgassing levels, particle generation, plasma resistance, and equipment design<\/span><span data-contrast=\"none\"> makes it a materials engineering problem. An engineering problem where the right answer varies considerably from one application to the next.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><span data-contrast=\"none\">Marco Sealing Solutions has supported semiconductor, life sciences, and precision manufacturing customers with demanding sealing requirements since 1980. Our engineers can\u00a0assist\u00a0with material\u00a0selection, review compound datasheets, and \u2014 when needed \u2014 develop custom formulations for applications where standard grades fall short.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p>Whatever material your application calls for, we stock a broad range of sealing compounds \u2014 including FFKM and other specialty elastomers \u2014 and can turn around emergency o-ring shipments fast to get a down semiconductor tool back online.<\/p>\n<p><b><span data-contrast=\"none\">Have\u00a0a specific\u00a0semiconductor\u00a0application?<\/span><\/b><span data-contrast=\"none\">\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/inquiry-quote.htm\"><span data-contrast=\"none\">Connect with a Marco sealing expert<\/span><\/a><span data-contrast=\"none\">\u00a0or explore our full\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/markez-o-rings.htm\"><span data-contrast=\"none\">Markez\u00ae FFKM compound line<\/span><\/a><span data-contrast=\"none\">\u00a0and\u00a0<\/span><a href=\"https:\/\/www.marcorubber.com\/semiconductor-o-rings.htm\"><span data-contrast=\"none\">semiconductor sealing resources<\/span><\/a><span data-contrast=\"none\">.<\/span><span data-ccp-props=\"{}\">\u00a0<\/span><\/p>\n<p><em><span class=\"TextRun SCXW89201150 BCX0\" lang=\"EN-US\" xml:lang=\"EN-US\" data-contrast=\"none\"><span class=\"NormalTextRun SCXW89201150 BCX0\">Marco Sealing Solutions (formerly Marco Rubber &amp; Plastics) is an ISO 9001:2015 certified manufacturer and supplier of specialty sealing solutions, with 3,000+ material formulations and engineering support available at no cost for qualified applications.<\/span><\/span><span class=\"EOP Selected SCXW89201150 BCX0\" data-ccp-props=\"{}\">\u00a0<\/span><\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Why\u00a0Semiconductor\u00a0Applications\u00a0Require\u00a0a Different Approach to Material Selection\u00a0 O-rings create the seal for vacuum environments, prevent toxic gas leaks, and contain corrosive chemicals. They are necessary for protecting highly sensitive wafers from particulate contamination and process defects. Material selection is also a key factor in reducing stickiness and adhesion issues for wafer transfer.\u00a0Therefore, selecting the right sealing [&hellip;]<\/p>\n","protected":false},"author":9,"featured_media":970,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[8],"tags":[],"class_list":["post-943","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-how-to"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v23.3 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Selecting the right sealing materials for semiconductor applications<\/title>\n<meta name=\"description\" content=\"See why selecting the right sealing materials for semiconductor applications demands a different approach \u2014 and how to get it right.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" 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