Fluoroelastomers (Viton®) O-Rings

VITON® (A) COMPOUNDS

Description: Excellent resistance to petroleum products and solvents. Very good high-temperature  performance. Fluorocarbon elastomers make up the most widely
used seals in the semiconductor industry.

Limitations: Avoid polar solvents, amines, anhydrous ammonia, SKYDROL,
hydrazine and hot acids.

Chemistry: Copolymer of vinylidene fluoride and hexafluoropropylene, although many more exotic versions exist for improved chemical resistance or low temperature performance.

Trade Names: VITON®, FLUOREL ® , TECHNOFLON ® , DAI-EL ®

ASTM D1418 Designation: FKM (FPM in Europe)

ASTM D2000/SAE J200 Type, Class: HK

Temperature Range: –40° to 200°C (–40° to 392°F)

Typical Uses: Crystal Growth, Epitaxial Silicon, LPCVD/Oxidation, Coater/Developer,
CVD, Dry Etch, Wet Etch, Cleaning, Resist Stripping, Ion Implant, PVD

*V1000 is our standard commercial Viton® material.
*Additional compounds available for specific applications.
We can supply both Glossy Finish Viton® and Matte Finish Viton®

Description: Specific compounding ingredients can reduce or eliminate the presence of carbon black. These compounds may provide improved resistance to oxidative environments and reactive plasmas. The inorganic pigments are not recommended for use in wet chemical environments as they have been shown to increase the extractable ionic contamination.

Chemistry: The base chemistry for these compounds remains relatively unchanged from the carbon-black-filled versions of these fluoroelastomers. Most non-black fluoroelas-tomers are based on a copolymer fluoroelastomer (vinylidene fluoride and hexafluoropropylene).