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Applied Materials P-5000
Slit Valve Door Seal Solution
Bonded Slit Valve Door Technology
Eliminate Installation Errors and Variations
Reduce Particle Generation caused by O-Ring Movement in the Gland
Increase Service Life 3 to 15 Times from Compression Set Reduction
The Seal is Bonded Directly to the Door
Have another problem with the P-5000 or other machine?
Contact a Semiconductor Application Engineer
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